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Search Results - "SHUGRUE, JOHN KEVIN"
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"SHUGRUE, JOHN KEVIN"
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기판 연마 요소들을 위한 격납 및 배출 시스템
by
TROJAN DANIEL RAY
,
SHUGRUE JOHN KEVIN
Year of Publication
06.11.2023
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SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING
by
LI CHEUK
,
SCHULTZ MICHAEL F
,
WINKLER JERELD LEE
,
SHUGRUE JOHN KEVIN
Year of Publication
17.10.2023
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SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING
by
LI CHEUK
,
SCHULTZ MICHAEL F
,
WINKLER JERELD LEE
,
SHUGRUE JOHN KEVIN
Year of Publication
11.05.2023
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MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM INCLUDING THE SUSCEPTOR, AND METHODS OF USING THE SAME
by
SHUGRUE JOHN KEVIN
Year of Publication
18.04.2016
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VARIABLE CONDUCTANCE GAS DISTRIBUTION APPARATUS AND METHOD
by
SHUGRUE JOHN KEVIN
Year of Publication
18.04.2016
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SEMICONDUCTOR PROCESSING APPARARUS AND METHODS FOR MONITORING AND CONTROLLING A SEMICONDUCTOR PROCESSING APPARATUS
by
VERGHESE MOHITH
,
DUNN TODD
,
SHUGRUE JOHN KEVIN
Year of Publication
18.09.2019
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APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A HIGH TEMPERATURE ENVIRONMENT
by
WHITE CARL LOUIS
,
SHUGRUE JOHN KEVIN
Year of Publication
02.09.2019
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APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADING CHAMBER RESULTING IN REDUCED CONTAMINATION
by
FONDURULIA KYLE
,
WHITE CARL LOUIS
,
MARQUARDT DAVID
,
SHUGRUE JOHN KEVIN
Year of Publication
13.05.2019
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Emissivity surface finish and porosity control of semiconductor reactor components
by
WHITE CARL LOUIS
,
SHUGRUE JOHN KEVIN
Year of Publication
16.01.2017
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SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING
by
LI CHEUK
,
SCHULTZ MICHAEL F
,
WINKLER JERELD LEE
,
SHUGRUE JOHN KEVIN
Year of Publication
11.12.2019
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SHOWERHEAD ASSEMBLY FOR DISTRIBUTING A GAS WITHIN A REACTION CHAMBER AND A METHOD FOR CONTROLLING THE TEMPERATURE UNIFORMITY OF A SHOWERHEAD ASSEMBLY
by
WHITE CARL LOUIS
,
WINKLER JERELD LEE
,
VERBAAS MELVIN
,
SHUGRUE JOHN KEVIN
Year of Publication
13.02.2019
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