LOW TEMPERATURE FORMATION OF LOW RESISTIVITY TITANIUM SILICIDE
MANN, RANDY W, MILES, GLEN L, HARPER, JAMES M.E, CABRAL JR., CYRIL, D'HEURLE, FRANCOIS M, CLEVENGER, LAWRENCE A, RAKOWSKI, DONALD W
Year of Publication 16.11.1998
Get full text
Year of Publication 16.11.1998
Patent