Growth and Characterization of Al2O3 Thin Films for the buffer Insulator in Pt/SrBi2Nb2O9/Al2O3/Si Ferroelectric Gate Oxide Structure
Hoon Sang Choi, Geun Sik Lim, Jong Han Lee, You Min Jang, Dong Chul Yoo, Jeong Yong Lee, In Hoon Choi
Published in Metals and materials international (01.06.2003)
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Published in Metals and materials international (01.06.2003)
Journal Article