Interconnects with Ti-containing liners
CARRUTHERS ROY ARTHUR, SHAW THOMAS MCCARROLL, HU CHAO-KUN, NOYAN ISMAIL CEVDET, CABRAL CYRIL JR, HARPER JAMES MCKELL EDWIN, LEE, KIM YANG, ROSENBERG ROBERT
Year of Publication 24.06.2002
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Year of Publication 24.06.2002
Patent