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"YOO, YONG SIK"
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HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD FOR FORMING PATTERNS
by
YANG SUNYOUNG
,
YOO YONG
-
SIK
,
PARK YUSHIN
,
KIM SUNGHWAN
Year of Publication
18.10.2022
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HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS
by
YOO YONG
-
SIK
,
LEE HYUN-SU
,
CHOI SEIL
,
CHOE HUISEON
,
WON DONGHOON
Year of Publication
04.07.2022
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POLYMER, HARDMASK COMPOSITION, AND METHOD OF FORMING PATTERNS
by
PARK SOYEON
,
YOO YONG
-
SIK
,
KIM YOUNG MIN
Year of Publication
09.07.2020
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apparatus specially adapted therefor
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