Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode
Yang, Yingbao, Toriyama, Seiya, Kinoshita, Masahiro, Saito, Kaoru, Sawai, Takuya, Koshigi, Junichi, Gotoh, Jun, Sugimoto, Shigeto, Yao, Jingbao, Zhao, Rui, Li, Jinming, Chen, Shouqing
Published in Proceedings of the International Display Workshops (15.12.2022)
Published in Proceedings of the International Display Workshops (15.12.2022)
Get full text
Journal Article
Single Crystallization Technology for Silicon Thin Films Transistor by Optical Fiber and Blue Laser Diode
Kosugi, Junichi, Kinoshita, Masahiro, Toriyama, Seiya, Kosuge, Takayuki, Saito, Kaori, Sawai, Takuya, YINGBAO, Yang, Sasaki, Nobuo, Gotoh, Jun, Sugimoto, Shigeto
Published in Proceedings of the International Display Workshops (09.12.2020)
Published in Proceedings of the International Display Workshops (09.12.2020)
Get full text
Journal Article
LASER ANNEALING DEVICE AND LASER ANNEALING METHOD
YANG YING-BO, KINOSHITA MICHIHIRO, SAWAI TAKUYA, TORIYAMA SEIYA, GOTO JUN, KOSUGI JUNICHI
Year of Publication 22.09.2023
Get full text
Year of Publication 22.09.2023
Patent
LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD
KOSUGI, Junichi, SAWAI, Takuya, TORIYAMA, Seiya, KINOSHITA, Masahiro, YANG, YingBao, GOTOH, Jun
Year of Publication 14.09.2023
Get full text
Year of Publication 14.09.2023
Patent