Topography hotspot-aware process control metrology cell insertion: DFM: Design for manufacturability
Nishat, Md Rezaul, Katakamsetty, Ushasree, Mehrotra, Vikas, Landis, Howard, Nakagawa, Sam, Huda, Gazi
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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