Micro manipulator for semiconductor integrated circuit manufacture/inspection, has three-link mechanisms fabricated into single unit, by cutting and folding sheet of flexible metal plate
KOIKE, HIDEMI, UKIANA, MOTOHIDE, MORITA, KAZUHIRO, FUJII, KAZUHIRO, TANIKAWA, TAMIO, ISAKOZAWA, SHIGETO
Year of Publication 13.03.2003
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Year of Publication 13.03.2003
Patent
Mikromanipulator
KOIKE, HIDEMI, UKIANA, MOTOHIDE, MORITA, KAZUHIRO, FUJII, KAZUHIRO, TANIKAWA, TAMIO, ISAKOZAWA, SHIGETO
Year of Publication 16.11.2006
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Year of Publication 16.11.2006
Patent