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Verfahren zum Invertieren lithographischer Muster und Halbleitervorrichtungen, die Strukturen mit hohem Aspektverhältnis beinhalten
by
Auth, Christopher P
,
St
.
Amour
,
Anthony
A
Year of Publication
14.06.2018
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MICROELECTRONIC TRANSISTOR CONTACTS AND METHODS OF FABRICATING THE SAME
by
ST
.
AMOUR
,
Anthony
,
STEIGERWALD, Joseph
Year of Publication
13.09.2017
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MICROELECTRONIC TRANSISTOR CONTACTS AND METHODS OF FABRICATING THE SAME
by
ST
.
AMOUR
,
ANTHONY
,
STEIGERWALD, JOSEPH
Year of Publication
28.09.2016
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TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
by
ST
.
AMOUR
,
Anthony
,
AUTH, Christopher P
,
HATTENDORF, Michael L
Year of Publication
05.06.2019
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basic electric elements
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