Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 18.07.2012
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Year of Publication 18.07.2012
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VERFAHREN ZUR KALIBRIERUNG EINES PYROMETERS, VERFAHREN ZUR BESTIMMUNG DER TEMPERATUR EINES HALBLEITERWAFERS UND SYSTEM ZUR BESTIMMUNG DER TEMPERATUR EINES HALBLEITERWAFERS
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 15.02.2012
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Year of Publication 15.02.2012
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Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 25.01.2012
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Year of Publication 25.01.2012
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Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 14.09.2011
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Year of Publication 14.09.2011
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Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 17.11.2010
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Year of Publication 17.11.2010
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