Apparatus for and method of protection during substrate processing
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DEN VEN, EVERHARDUS P, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 13.03.1996
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Year of Publication 13.03.1996
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Chemical vapor deposition apparatus and method for exclusion of deposition and contamination from the backside and periphery of the wafers
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DE VEN, EVERHARDUS P, LANE, LAWRENCE C, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 29.10.1997
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Year of Publication 29.10.1997
Patent
Apparatus for and method of protection during substrate processing
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DEN VEN, EVERHARDUS P, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 22.01.1992
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Year of Publication 22.01.1992
Patent
Chemical vapor deposition apparatus and method for exclusion of deposition and contamination from the backside and periphery of the wafers
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DE VEN, EVERHARDUS P, LANE, LAWRENCE C, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 28.02.1996
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Year of Publication 28.02.1996
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Gas-based substrate deposition protection
BENZING, JEFFREY C, MCINERNEY, VAN DE VEN, EVERHARDUS P, BURKHARD, CHRISTOPHER W, LANE, LAWRENCE C, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 28.02.1996
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Year of Publication 28.02.1996
Patent
Vorrichtung und Verfahren zum Substratschutz während Substratbearbeitung
CHIN, BARRY L., SUNNYVALE, CA 94087, US, BROADBENT, ELIOT K., SAN JOSE, CA 95148, US, BURKHART, CHRISTOPHER W., SAN JOSE, CA 95124, US, VAN DEN VEN, EVERHARDUS P., CUPERTINO, CA 95014, US, BENZING, JEFFREY C., SAN JOSE, CA 95129, US
Year of Publication 08.08.1996
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Year of Publication 08.08.1996
Patent
VORRICHTUNG UND VERFAHREN ZUM SUBSTRATSCHUTZ WAEHREND SUBSTRATBEARBEITUNG
CHIN, BARRY L., SUNNYVALE, CALIFORNIA 94087, US, VAN DEN VEN, EVERHARDUS P., CUPERTINO, CALIFORNIA 95014, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US, BENZING, JEFFREY C., SAN JOSE, CALIFORNIA 95129, US, BURKHART, CHRISTOPHER W., SAN JOSE, CALIFORNIA 95124, US
Year of Publication 23.07.1992
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Year of Publication 23.07.1992
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Magnetron-Zerstäubungsvorrichtung
MILLER, KENNETH C., MOUNTAIN VIEW, CALIFORNIA 94043, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US
Year of Publication 24.10.1996
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Year of Publication 24.10.1996
Patent
MAGNETRON-ZERSTAEUBUNGSVORRICHTUNG
MILLER, KENNETH C., MOUNTAIN VIEW, CALIFORNIA 94043, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US
Year of Publication 18.03.1993
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Year of Publication 18.03.1993
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Vorrichtung und Methode zum Schützen der Rückseite einer Scheibe während der Bearbeitung
VAN DE VEN, EVERHARDUS P., CUPERTINO, CALIFORNIA 95014, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US, THOMAS, MICHAEL E., MILPITAS, CALIFORNIA 95035, US
Year of Publication 05.02.1998
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Year of Publication 05.02.1998
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VORRICHTUNG UND METHODE ZUM SCHUETZEN DER RUECKSEITE EINER SCHEIBE WAEHREND DER BEARBEITUNG
VAN DE VEN, EVERHARDUS P., CUPERTINO, CALIFORNIA 95014, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US, THOMAS, MICHAEL E., MILPITAS, CALIFORNIA 95035, US
Year of Publication 24.09.1992
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Year of Publication 24.09.1992
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