Triangular deposition chamber for a vapor deposition system
GOELA, JITENDRA S, MACDONALD, JAMES C, TEVEROVSKY, ALEXANDER, BURNS, LEE E
Year of Publication 22.07.1998
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Year of Publication 22.07.1998
Patent
TRIANGULAR DEPOSITION CHAMBER FOR A VAPOR DEPOSITION SYSTEM
GOELA, JITENDRA S, MACDONALD, JAMES C, TEVEROVSKY, ALEXANDER, BURNS, LEE E
Year of Publication 20.05.1997
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Year of Publication 20.05.1997
Patent
Triangular deposition chamber for a vapor deposition system
GOELA, JITENDRA S, MACDONALD, JAMES C, TEVEROVSKY, ALEXANDER, BURNS, LEE E
Year of Publication 14.12.1994
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Year of Publication 14.12.1994
Patent
Triangular Deposition Chamber for a Vapor Deposition System
GOELA, JITENDRA S, MACDONALD, JAMES C, TEVEROVSKY, ALEXANDER, BURNS, LEE E
Year of Publication 09.12.1994
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Year of Publication 09.12.1994
Patent