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Year of Publication 23.04.2008
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PROPORTIONAL MICROMECHANICAL VALVE
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Year of Publication 20.07.2005
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PROPORTIONAL MICROMECHANICAL VALVE
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PROPORTIONAL MICROMECHANICAL VALVE
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Year of Publication 04.12.2003
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Year of Publication 26.06.2003
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PROPORTIONAL MICROMECHANICAL DEVICE
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Year of Publication 25.07.2001
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PROPORTIONAL MICROMECHANICAL DEVICE
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Year of Publication 06.07.2000
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PROPORTIONAL MICROMECHANICAL DEVICE
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Year of Publication 16.03.2000
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