SILICON WAFERS WITH INTRINSIC GETTERING AND GATE OXIDE INTEGRITY YIELD
RYU, Jae-Woo, KIM, Tae Hoon, JI, Jun Hwan, LEE, Young Jung, FALSTER, Robert J, KIM, Byung Chun, HUDSON, Carissima Marie, PARK, Soon Sung
Year of Publication 28.02.2024
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Year of Publication 28.02.2024
Patent
SILICON WAFERS WITH INTRINSIC GETTERING AND GATE OXIDE INTEGRITY YIELD
RYU, Jae-Woo, KIM, Tae Hoon, JI, Jun Hwan, LEE, Young Jung, FALSTER, Robert J, KIM, Byung Chun, HUDSON, Carissima Marie, PARK, Soon Sung
Year of Publication 20.05.2020
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Year of Publication 20.05.2020
Patent