LAYOUT MEASURES FOR LIMITING THE PROPAGATION OF SURFACE CRACKS IN MEMS
SCHELLING, CHRISTOPH, EBERLE-GOUBET, KLAUS, WEBER, HERIBERT, FUERTSCH, MATTHIAS, BAISCH, JOERG, GRUEN, DETLEF, DUELL, ANDREAS
Year of Publication 19.05.2005
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Year of Publication 19.05.2005
Patent