A Single-Wafer-Processed XY-Stage Fabricated with Trench-sidewall Doping and Refilled-Trench Isolating Technology
Lei Gu, Xinxin Li, Haifei Bao, Bin Liu, Yuelin Wang, Min Liu, Zunxian Yang, Baoluo Cheng
Published in 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2006)
Published in 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2006)
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Conference Proceeding
A trench-sidewall single-wafer-MEMS technology and its typical application in high-performance accelerometers
Xinxin Li, Baoluo Cheng, Yuelin Wang, Lei Gu, Jian Dong, Heng Yang, Zhaohui Song
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
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Conference Proceeding