METHOD OF AUTOMATICALLY FOCUSING A CHARGED PARTICLE BEAM ON A SURFACE REGION OF A SAMPLE, METHOD OF CALCULATING A CONVERGING SET OF SHARPNESS VALUES OF IMAGES OF A CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE FOR IMAGING A SAMPLE
SCHULER, BERNHARD, VIRDI, KULPREET SINGH, TRAUNER, ROBERT, KNAUB, NIKOLAI, MUELLER, BERNHARD G
Year of Publication 11.12.2021
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Year of Publication 11.12.2021
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METHOD OF AUTOMATICALLY FOCUSING CHARGED PARTICLE BEAM ON SURFACE REGION OF SAMPLE, METHOD OF CALCULATING CONVERGING SET OF SHARPNESS VALUES OF IMAGES OF CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE FOR IMAGING SAMPLE
VIRDI KULPREET SINGH, SCHULER BERNHARD, MUELLER BERNHARD G, TRAUNER ROBERT, KNAUB NIKOLAI
Year of Publication 03.12.2021
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Year of Publication 03.12.2021
Patent
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
SCHULER, BERNHARD, VIRDI, KULPREET SINGH, TRAUNER, ROBERT, KNAUB, NIKOLAI, MUELLER, BERNHARD G
Year of Publication 01.01.2021
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Year of Publication 01.01.2021
Patent