Apparatus for post exposure bake of photoresist
LUBOMIRSKY, DMITRY, BUCHBERGER JR., DOUGLAS A, DUKOVIC, JOHN O, NEMANI, SRINIVAS D
Year of Publication 16.09.2022
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Year of Publication 16.09.2022
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Apparatus for post exposure bake of photoresist
LUBOMIRSKY, DMITRY, BUCHBERGER JR., DOUGLAS A, DUKOVIC, JOHN O, NEMANI, SRINIVAS D
Year of Publication 01.09.2022
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Year of Publication 01.09.2022
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Additive patterning of semiconductor film stacks
GOPALRAJA, PRABURAM, DUKOVIC, JOHN O, WELCH, STEVEN HILOONG, YIEH, ELLIE Y, NEMANI, SRINIVAS D, CITLA, BHARGAV S
Year of Publication 16.05.2021
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Year of Publication 16.05.2021
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Pulse plating of a low stress film on a solar cell substrate
KOVARSKY NICOLAY Y, DUKOVIC JOHN O, EAGLESHAM DAVID, LOPATIN SERGEY, GAY CHARLES
Year of Publication 17.08.2011
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Year of Publication 17.08.2011
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Method of direct plating of copper on a substrate structure
SUN, ZHI-WEN, ZHU, LEI, DUKOVIC, JOHN, ROSENFELD, ARON, HAFEZI, HOOMAN, CHUNG, HUA, KOVARSKY, NICOLAY, HE, RENREN
Year of Publication 11.11.2012
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Year of Publication 11.11.2012
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Precision printing electroplating through plating mask on a solar cell substrate
KOVARSKY, NICOLAY Y, BACHRACH, ROBERT, LOPATIN, SERGEY, DUKOVIC, JOHN O, EAGLESHAM, DAVID, GAY, CHARLES, BUSCH, JOHN
Year of Publication 16.08.2008
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Year of Publication 16.08.2008
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Apparatus and method for electroplating on a solar cell substrate
KOVARSKY, NICOLAY Y, LOPATIN, SERGEY, EAGLESHAM, DAVID, DUKOVIC, JOHN O, GAY, CHARLES
Year of Publication 16.08.2008
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Year of Publication 16.08.2008
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Pulse plating of a low stress film on a solar cell substrate
KOVARSKY, NICOLAY Y, LOPATIN, SERGEY, GAY, CHARLES, EAGLESHAM, DAVID, DUKOVIC, JOHN O
Year of Publication 01.07.2008
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Year of Publication 01.07.2008
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Counter electrode encased in cation exchange membrane tube for electroplating cell
ROSENFELD, ARON, BIRANG, MANOOCHER, DUKOVIC, JOHN O, SINGH, SARAVJEET, HAFEZI, HOOMAN, BEHNKE, JOSEPH
Year of Publication 01.12.2006
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Year of Publication 01.12.2006
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Electrochemical plating cell with an auxiliary electrode in an isolated anolyte compartment
CHANG, ANZHONG, WANG, YOU, DUKOVIC, JOHN O, SINGH, SARAVJEET, KOVARSKY, NICOLAY
Year of Publication 16.02.2006
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Year of Publication 16.02.2006
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Method of direct plating of copper on a substrate structure
SUN, ZHI-WEN, ZHU, LEI, DUKOVIC, JOHN, ROSENFELD, ARON, HAFEZI, HOOMAN, CHUNG, HUA, KOVARSKY, NICOLAY, HE, RENREN
Year of Publication 01.09.2007
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Year of Publication 01.09.2007
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