An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering
Liang, Yuan-Chang, Lee, Hsin-Yi, Liu, Heng-Jui, Hsieh, Yung-Wei, Liang, Yung-Ching
Published in Journal of synchrotron radiation (01.01.2007)
Published in Journal of synchrotron radiation (01.01.2007)
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Journal Article
Characteristics of sputter-deposited Ru thin films on Si substrates
Lee, Hsin-Yi, Hsieh, Yung-Wei, Hsu, C.-H., Liang, K.S.
Published in Materials chemistry and physics (20.12.2003)
Published in Materials chemistry and physics (20.12.2003)
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Journal Article