Development of High-Density Metal-Insulator-Metal Capacitors with Top and Side Contacts
Xu, Dewei, Chen, Junyang, Koh, Jimmy, Motoyama, Emiko, Rajachidambaram, Meena, Fakhoury, Jean Raymond, Kamlapurkar, Radhika, Gantt, Rachel, Palmieri, Daniel, Alexander, J. Nicholas, Korevaar, Bas, Gordon, Edward, Kauerauf, Thomas, Tang, Teck Jung, Fox, Robert, Kook, Seung-Yeop, Hu, Owen
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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