Phase shifting masks in Displacement Talbot Lithography for printing nano-grids and periodic motifs
Solak, Harun H., Dais, Christian, Clube, Francis, Wang, Li
Published in Microelectronic engineering (01.08.2015)
Published in Microelectronic engineering (01.08.2015)
Get full text
Journal Article
Sub-wavelength printing in the deep ultra-violet region using Displacement Talbot Lithography
Wang, Li, Clube, Francis, Dais, Christian, Solak, Harun H., Gobrecht, Jens
Published in Microelectronic engineering (01.08.2016)
Published in Microelectronic engineering (01.08.2016)
Get full text
Journal Article