Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
Steen, Steven, McNab, Sharee J., Sekaric, Lidija, Babich, Inna, Patel, Jyotica, Bucchignano, Jim, Rooks, Michael, Fried, David M., Topol, Anna W., Brancaccio, Jim R., Yu, Roy, Hergenrother, John M., Doyle, James P., Nunes, Ron, Viswanathan, Raman G., Purushothaman, Sampath, Rothwell, Mary Beth
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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