An Empirical Investigation on the Effect of Oxygen Vacancy in ZrO2 Thin Film on the Frequency-Dependent Capacitance Degradation in the Metal-Insulator-Metal Capacitor
Han, Dong Hee, Lee, Seungwoo, Hwang, Ji Hyeon, Kim, Youngjin, Bonvalot, Marceline, Vallee, Christophe, Gonon, Patrice, Jeon, Woojin
Published in IEEE transactions on electron devices (01.11.2021)
Published in IEEE transactions on electron devices (01.11.2021)
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Journal Article
Atomic and Molecular Layer Deposition Area Selective Deposition using alternate deposition and etch super-cycle strategies
Bonvalot, Marceline, Vallee, Christophe, Mannequin, Cedric, Jaffal, Moustapha, Gassilloud, Remy, Posseme, Nicolas, Chevolleau, Thierry
Published in Dalton transactions : an international journal of inorganic chemistry (16.11.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (16.11.2021)
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Journal Article
An Empirical Investigation on the Effect of Oxygen Vacancy in ZrO 2 Thin Film on the Frequency-Dependent Capacitance Degradation in the Metal–Insulator–Metal Capacitor
Han, Dong Hee, Lee, Seungwoo, Hwang, Ji Hyeon, Kim, Youngjin, Bonvalot, Marceline, Vallee, Christophe, Gonon, Patrice, Jeon, Woojin
Published in IEEE transactions on electron devices (01.11.2021)
Published in IEEE transactions on electron devices (01.11.2021)
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Journal Article
Area selective deposition using alternate deposition and etch super-cycle strategies
Bonvalot, Marceline, Vallée, Christophe, Mannequin, Cédric, Jaffal, Moustapha, Gassilloud, Rémy, Possémé, Nicolas, Chevolleau, Thierry
Published in Dalton transactions : an international journal of inorganic chemistry (04.01.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (04.01.2022)
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Journal Article
Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO2 Using Trivinylmethoxysilane and Oxygen Plasma
Nguyen, Viet Huong, Sekkat, Abderrahime, Masse de la Huerta, César Arturo, Zoubian, Fadi, Crivello, Chiara, Rubio-Zuazo, Juan, Jaffal, Moustapha, Bonvalot, Marceline, Vallée, Christophe, Aubry, Olivier, Rabat, Hervé, Hong, Dunpin, Muñoz-Rojas, David
Published in Chemistry of materials (23.06.2020)
Published in Chemistry of materials (23.06.2020)
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Journal Article
Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO 2 Using Trivinylmethoxysilane and Oxygen Plasma
Nguyen, Viet Huong, Sekkat, Abderrahime, Masse de la Huerta, César Arturo, Zoubian, Fadi, Crivello, Chiara, Rubio-Zuazo, Juan, Jaffal, Moustapha, Bonvalot, Marceline, Vallée, Christophe, Aubry, Olivier, Rabat, Hervé, Hong, Dunpin, Muñoz-Rojas, David
Published in Chemistry of materials (23.06.2020)
Published in Chemistry of materials (23.06.2020)
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Journal Article
Nouveaux Travaux Pratiques d’Elaboration et de Caractérisation de cellules de mémoires résistives de type OxRAM
Bonvalot, Marceline, Constantin, Delphine, Pointet, John, Bsiesy, Ahmad
Published in Journal sur l'enseignement des sciences et technologies de l'information et des systèmes (2017)
Published in Journal sur l'enseignement des sciences et technologies de l'information et des systèmes (2017)
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Journal Article
Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications
KAHN, Maurice, VALLEE, Christophe, DEFAY, Emmanuel, DUBOURDIEU, Catherine, BONVALOT, Marceline, BLONKOWSKI, Serge, PLAUSSU, Jean-Raoul, GARREC, Pierre, BARON, Thierry
Published in Microelectronics and reliability (01.04.2007)
Published in Microelectronics and reliability (01.04.2007)
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Conference Proceeding
Journal Article
Improved electrical properties using SrTiO 3/Y 2O 3 bilayer dielectrics for MIM capacitor applications
Kahn, Maurice, Vallée, Christophe, Defay, Emmanuel, Dubourdieu, Catherine, Bonvalot, Marceline, Blonkowski, Serge, Plaussu, Jean-Raoul, Garrec, Pierre, Baron, Thierry
Published in Microelectronics and reliability (2007)
Published in Microelectronics and reliability (2007)
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Journal Article
Magnetic levitation stabilized by eddy currents
Bonvalot, Marceline, Courtois, Pierre, Gillon, Pascale, Tournier, Robert
Published in Journal of magnetism and magnetic materials (01.11.1995)
Published in Journal of magnetism and magnetic materials (01.11.1995)
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Journal Article