Short-period multilayer X-ray mirrors
Andreev, S. S., Bibishkin, M. S., Chkhalo, N. I., Kluenkov, E. B., Prokhorov, K. A., Salashchenko, N. N., Zorina, M. V., Schafers, F., Shmaenok, L. A.
Published in Journal of synchrotron radiation (01.09.2003)
Published in Journal of synchrotron radiation (01.09.2003)
Get full text
Journal Article
Gas-Monitor Detector for Intense and Pulsed VUV/EUV Free-Electron Laser Radiation
Sorokin, A A, Bobashev, S V, Feldhaus, J, Gerth, Ch, Gottwald, A, Hahn, U, Kroth, U, Richter, M, Shmaenok, L A, Steeg, B, Tiedtke, K, Treusch, R
Published in AIP conference proceedings (12.05.2004)
Published in AIP conference proceedings (12.05.2004)
Get full text
Journal Article
Extreme Ultraviolet Spectroscopy of a Laser Plasma Source for Lithography
Shevelko, A P, Shmaenok, L A, Churilov, S S, Bastiaensen, R K F J, Bijkerk, F
Published in Physica scripta (01.02.1998)
Published in Physica scripta (01.02.1998)
Get full text
Journal Article
Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment
Louis, E., Voorma, H.-J., Koster, N.B., Shmaenok, L., Bijkerk, F., Schlatmann, R., Verhoeven, J., Platonov, Yu.Ya, van Dorssen, G.E., Padmore, H.A.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
Get full text
Journal Article
Multilayer dispersion optics for X-ray radiation
Andreev, S.S, Mertins, H.-Ch, Platonov, Yu.Ya, Salashchenko, N.N, Schaefers, F, Shamov, E.A, Shmaenok, L.A
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Get full text
Journal Article
A high-power, low-contamination laser plasma source for Extreme UV lithography
Bijkerk, F., Shmaenok, L.A., Shevelko, A.P., Bastiaensen, R.K.F.J., Bruineman, C., van Honk, A.G.J.R.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
Get full text
Journal Article
Conference Proceeding
Extreme UV lithography: A new laser plasma target concept and fabrication of multilayer reflection masks
Bijkerk, F., Shmaenok, L.A., Louis, E., Voorma, H.J., Koster, N.B., Bruineman, C., Bastiaensen, R.K.F.J., van der Drift, E.W.J.M., Romijn, J., de Groot, L.E.M., Rousseeuw, B.A.C., Zijlstra, T., Platonov, Yu.Ya, Salashchenko, N.N.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
Get full text
Journal Article
Conference Proceeding
Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm)
Andreev, S.S., Barysheva, M.M., Chkhalo, N.I., Gusev, S.A., Pestov, A.E., Polkovnikov, V.N, Salashchenko, N.N., Shmaenok, L.A., Vainer, Yu.A., Zuev, S.Yu
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
Get full text
Journal Article
Issues of laser plasma sources for soft x-ray projection lithography
Shmaenok, L., Bijkerk, F., Louis, E., van Honk, A., van der Wiel, M.J., Platonov, Yu, Shevelko, A., Mitrofanov, A., Frowein, H., Nicolaus, B., Voβ, F., Désor, R.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
Get full text
Journal Article
Absolute photometry of pulsed intense fluxes of ultrasoft X-ray radiation
Bobashev, S V, Golubev, A V, Platonov, Yu Ya, Salashchenko, N N, Shmaenok, L A, Volkov, G S, Zaitsev, V I
Published in Physica scripta (01.04.1991)
Published in Physica scripta (01.04.1991)
Get full text
Journal Article
Development of low-energy X-ray fluorescence micro-distribution analysis using a laser plasma X-ray source and multilayer optics
STUIK, R, SHMAENOK, L. A, FLEDDERUS, H, ANDREEV, S. S, SHAMOV, E. A, ZUEV, S. Yu, SALASHCHENKO, N. N, BIJKERK, F
Published in Journal of analytical atomic spectrometry (1999)
Published in Journal of analytical atomic spectrometry (1999)
Get full text
Conference Proceeding
Journal Article
Soft x-ray projection lithography using a high repetition rate laser-induced x-ray source for sub- 100 nanometer lithography processes
Louis, E., Bijkerk, F., Shmaenok, L., Voorma, H.-J., van der Wiel, M.J., Schlatmann, R., Verhoeven, J., van der Drift, E.W.J.M., Romijn, J., Rousseeuw, B.A.C., Voβ, F., Desor, R., Nikolaus, B.
Published in Microelectronic engineering (01.04.1993)
Published in Microelectronic engineering (01.04.1993)
Get full text
Journal Article
Comparative heat load testing of freestanding multilayer Mo/ZrSi2 and Mo/NbSi2
Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
Published in Bulletin of the Russian Academy of Sciences. Physics (2013)
Published in Bulletin of the Russian Academy of Sciences. Physics (2013)
Get full text
Journal Article
Multilayer EUV/X-ray polychromators for plasma diagnostics
Shmaenok, L.A., Platonov, Yu.Ya, Salashchenko, N.N., Sorokin, A.A., Simanovskii, D.M., Golubev, A.V., Belik, V.P., Bobashev, S.V., Bijkerk, F., Louis, E., Meijer, F.G., Etlicher, B., Grudsky, A.Ya
Published in Journal of electron spectroscopy and related phenomena (01.05.1996)
Published in Journal of electron spectroscopy and related phenomena (01.05.1996)
Get full text
Journal Article
Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C
Gusev, S. A., Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Pariev, D. E., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.05.2012)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.05.2012)
Get full text
Journal Article
Evolution of elemental distribution in free-standing structures of Zr/ZrSi2 with MoSi2 and ZrSi2 protective coatings under annealing
Drozdov, M. N., Drozdov, Yu. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Salashchenko, N. N., Tsybin, N. N., Shmaenok, L. A.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Get full text
Journal Article
Mo-based EUV multilayer filters with enhanced thermal stability
Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Get full text
Journal Article
SIMS study of annealing effect on element distribution in free-standing Al/Si and Zr/ZrSi2 multilayer films
Drozdov, M. N., Drozdov, Yu. N., Kluenkov, E. B., Luchin, V. I., Lopatin, A. Ya, Salashchenko, N. N., Tsybin, N. N., Shmaenok, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2010)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2010)
Get full text
Journal Article
Overview of Core Diagnostics for TEXTOR
Donné, A. J. H., de Bock, M. F. M., Classen, I. G. J., Von Hellermann, M. G., Jakubowska, K., Jaspers, R., Barth, C. J., Van Der Meiden, H. J., Oyevaar, T., Van De Pol, M. J., Varshney, S. K., Bertschinger, G., Biel, W., Busch, C., Finken, K. H., Koslowski, H. R., KrÄmer-Flecken, A., Kreter, A., Liang, Y., Oosterbeek, H., Zimmermann, O., Telesca, G., Verdoolaege, G., Domier, C. W., Luhmann, N. C., Mazzucato, E., Munsat, T., Park, H., Kantor, M., Kouprienko, D., Alexeev, A., Ohdachi, S., Korsholm, S., Woskov, P., Bindslev, H., Meo, F., Michelsen, P. K., Michelsen, S., Nielsen, S. K., Tsakadze, E., Shmaenok, L.
Published in Fusion science and technology (01.02.2005)
Published in Fusion science and technology (01.02.2005)
Get full text
Journal Article
Spectroscopical diagnostics of alpha particles in the TSP tokamak
Belik, V. P., Simanovskaya, N. B., Shmaenok, L. A.
Published in Journal of applied spectroscopy (01.06.1991)
Published in Journal of applied spectroscopy (01.06.1991)
Get full text
Journal Article