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Year of Publication 11.06.2019
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Diffusion barrier layer formation
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Year of Publication 01.01.2019
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Year of Publication 27.12.2018
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Diffusion barrier layer formation
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Year of Publication 19.12.2017
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DIFFUSION BARRIER LAYER FORMATION
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Year of Publication 22.09.2016
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Year of Publication 15.09.2016
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Diffusion barrier layer formation
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Year of Publication 02.08.2016
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Year of Publication 31.03.2016
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Automatic capacitance tuning for robust middle of the line contact and silicide applications
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Year of Publication 29.12.2015
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Accurate polysilicon resistor structure and integrated circuit
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Year of Publication 02.09.2015
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Overlapping contacts for semiconductor device
HILSCHER DAVID F, HALL LINDSEY, ENGEL BRETT H, SOSS STEVEN R, KNARR RANDOLPH F, WALLNER JIN Z
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Year of Publication 27.01.2015
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Year of Publication 26.06.2014
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Year of Publication 26.06.2014
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