Enhanced hole mobility in non-(001) oriented sidewall corner of Si pMOSFETs formed on (001) substrate
Chih-Yu Hsu, Hua-Gang Chang, Shin-Jiun Kuang, Wei-Han Lee, Yu-Cheng Chen, Chien-Chih Lee, Ming-Jer Chen
Published in 2010 Silicon Nanoelectronics Workshop (01.06.2010)
Published in 2010 Silicon Nanoelectronics Workshop (01.06.2010)
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