Search Results - "CATABAY; WILBUR" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Chemical mechanical polishing of low dielectric constant oxide films deposited using Flowfill chemical vapor deposition technology

Chemical mechanical polishing of low dielectric constant oxide films deposited using Flowfill chemical vapor deposition technology

by HAO CUI, BHAT, Ishwara B, MURARKA, Shyam P, HONGQIANG LU, WEIDAN LI, HSIA, Wei-Jen, CATABAY, Wilbur
Published in Journal of the Electrochemical Society (01.10.2000)

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Journal Article

Al-Ge Eutectic Wafer Bonding and Bond Characterization for CMOS Compatible Wafer Packaging

Al-Ge Eutectic Wafer Bonding and Bond Characterization for CMOS Compatible Wafer Packaging

by Sood, Sumant, Farrens, Shari, Pinker, Ron, Xie, James, Cataby, Wilbur
Published in ECS transactions (01.01.2010)

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Journal Article

Process Characterization and Control of Polycrystalline SiGe as the Gate Electrode in CMOS Fabrication

Process Characterization and Control of Polycrystalline SiGe as the Gate Electrode in CMOS Fabrication

by Lin, Hong, Lo, Wai, Gu, Shiqun, Hornback, Verne, Elmer, Jim, Catabay, Wilbur
Published in Journal of the Electrochemical Society (2005)

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Journal Article

Method for forming a low K dielectric composite layer in integrated circuits structures

Method for forming a low K dielectric composite layer in integrated circuits structures

by Catabay, Wilbur G, Schinella, Richard
Year of Publication 30.01.2019

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Patent

Deposition and Characterization of Polycrystalline Si[sub 1−x]Ge[sub x] Films for CMOS Transistors Gate Electrode Applications

Deposition and Characterization of Polycrystalline Si[sub 1−x]Ge[sub x] Films for CMOS Transistors Gate Electrode Applications

by Lo, Wai, Lin, Hong, Hsia, Wei-Jen, Yates, Colin, Hornback, Verne, Elmer, Jim, Catabay, Wilbur, Mirabedini, Mohammad, Gopinath, Venkatesh, Li, Erhong, Pachura, David, Lin, Joyce, Duong, Lesly, Prasad, Sharad, Matsunaga, Masanobu, Tsuda, Toshitake
Published in Journal of the Electrochemical Society (2005)

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Journal Article

Deposition and Characterization of Polycrystalline Si1-xGex Films for CMOS Transistors Gate Electrode Applications

Deposition and Characterization of Polycrystalline Si1-xGex Films for CMOS Transistors Gate Electrode Applications

by Lo, Wai, Lin, Hong, Hsia, Wei-Jen, Yates, Colin, Hornback, Verne, Elmer, Jim, Catabay, Wilbur, Mirabedini, Mohammad, Gopinath, Venkatesh, Li, Erhong, Pachura, David, Lin, Joyce, Duong, Lesly, Prasad, Sharad, Matsunaga, Masanobu, Tsuda, Toshitake
Published in Journal of the Electrochemical Society (01.01.2005)

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Journal Article

Low dielectric constant silicon oxide-based dielectric layer for integrated circuit structures having improved compatibility with via filler materials, and method of making same

Low dielectric constant silicon oxide-based dielectric layer for integrated circuit structures having improved compatibility with via filler materials, and method of making same

by Li, Weidan, Catabay, Wilbur G, Zhao, Joe, Hsia, Wei-Jen
Year of Publication 23.01.2019

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Patent

Bi-axial texturing of high-K dielectric films to reduce leakage currents

Bi-axial texturing of high-K dielectric films to reduce leakage currents

by Lo, Wai, Sun, Sey-Shing, Catabay, Wilbur
Year of Publication 07.06.2011

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Patent

Electro chemical mechanical polishing method and device for planarizing semiconductor surfaces

Electro chemical mechanical polishing method and device for planarizing semiconductor surfaces

by ZHU MEI, CATABAY WILBUR G
Year of Publication 23.10.2007

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Patent

Electro chemical mechanical polishing method and device for planarizing semiconductor surfaces

Electro chemical mechanical polishing method and device for planarizing semiconductor surfaces

by Zhu, Mei, Catabay, Wilbur G
Year of Publication 23.10.2007

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Patent

Bi-axial texturing of high-K dielectric films to reduce leakage currents

Bi-axial texturing of high-K dielectric films to reduce leakage currents

by Lo, Wai, Sun, Sey-Shing, Catabay, Wilbur
Year of Publication 17.11.2009

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Patent

Diamond barrier layer

Diamond barrier layer

by Catabay, Wilbur, Wang, Zhihai
Year of Publication 03.04.2003

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Patent

Dielectric barrier layer for increasing electromigration lifetimes in copper interconnect structures

Dielectric barrier layer for increasing electromigration lifetimes in copper interconnect structures

by Cui, Hao, Burke, Peter A, Catabay, Wilbur G
Year of Publication 25.10.2011

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Patent

Dielectric barrier layer for increasing electromigration lifetimes in copper interconnect structures

Dielectric barrier layer for increasing electromigration lifetimes in copper interconnect structures

by CUI HAO, CATABAY WILBUR G, BURKE PETER A
Year of Publication 25.10.2011

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Patent

Low k dielectric composite layer for integrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning

Low k dielectric composite layer for integrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning

by Catabay, Wilbur, Schinella, Richard
Year of Publication 05.09.2002

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Patent

Bi-axial texturing of high-K dielectric films to reduce leakage currents

Bi-axial texturing of high-K dielectric films to reduce leakage currents

by LO WAI, SUN SEY-SHING, CATABAY WILBUR
Year of Publication 07.06.2011

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Patent

Viscous electropolishing system

Viscous electropolishing system

by SUKHAREV VALERIY, CATABAY WILBUR G
Year of Publication 30.08.2005

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Patent

Viscous electropolishing system

Viscous electropolishing system

by Sukharev, Valeriy, Catabay, Wilbur G
Year of Publication 30.08.2005

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Patent

Multi-step process for forming a barrier film for use in copper layer formation

Multi-step process for forming a barrier film for use in copper layer formation

by Catabay, Wilbur G, Wang, Zhihai, Li, Ping
Year of Publication 19.08.2008

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Patent

Electro chemical mechanical polishing method

Electro chemical mechanical polishing method

by ZHU MEI, CATABAY WILBUR G
Year of Publication 22.02.2005

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Patent

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