Evacuation Characteristics of Screw-Grooved Molecular Pump
Kanki, Tatsuo, Harada, Susumu, Asano, Tsuyoshi, Maki, Hiromitsu, Egawa, Wataru, Sakamoto, Ryuichi, Matsumoto, Takao, Tarutani, Isamu
Published in KAGAKU KOGAKU RONBUNSHU (01.01.1993)
Published in KAGAKU KOGAKU RONBUNSHU (01.01.1993)
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