Heterodyning of speckle shearing interferometers by laser diode wavelength modulation
Huang, Jen-Rong, Ford, Helen D, Tatam, Ralph P
Published in Measurement science & technology (01.12.1996)
Published in Measurement science & technology (01.12.1996)
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Journal Article
Method for depositing microcrystalline silicon and monitor device of plasma enhanced deposition
LIANG MUH-WANG, LEE SHENG-LANG, HUANG JEN-RONG, DU CHENUNG, CHANG CHIA-HAO
Year of Publication 07.05.2013
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Year of Publication 07.05.2013
Patent
METHOD FOR DEPOSITING MICROCRYSTALLINE SILICON AND MONITOR DEVICE OF PLASMA ENHANCED DEPOSITION
LIANG MUH-WANG, LEE SHENG-LANG, HUANG JEN-RONG, DU CHENUNG, CHANG CHIA-HAO
Year of Publication 09.06.2011
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Year of Publication 09.06.2011
Patent
PLASMA ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND THE CONTROLLING METHOD THEREOF
WANG CHINGIUN, LEE KANG-FENG, LEE SHENG-LANG, HO JUNGN, HUANG JEN-RONG, CHIANG CHINONG, SHEN TEAN-MU
Year of Publication 22.03.2012
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Year of Publication 22.03.2012
Patent
CAPACITIVELY COUPLED PLASMA (CCP) GENERATOR WITH TWO INPUT PORTS
WU TUNGUAN, LIANG MUH-WANG, WU CHING-HUEI, CHANG CHIHN, HUANG JEN-RONG, LO CHAN-HSING, CHANG CHIA-HAO
Year of Publication 10.06.2010
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Year of Publication 10.06.2010
Patent
Wafer electroplating apparatus
LIANG MUH-WANG, WANG CHIHNG, WENG YIAO, CHIANG PANG-MING, HUANG JEN-RONG, TSENG CHIH-YUAN, DU CHENUNG
Year of Publication 11.11.2008
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Year of Publication 11.11.2008
Patent
Compress and position apparatus
Du, Chen-Chung, Chiang, Pang-Ming, Huang, Jen-Rong, Liang, Muh-Wang, Weng, Yi-Chao
Year of Publication 04.04.2006
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Year of Publication 04.04.2006
Patent
Compress and position apparatus
LIANG MUH-WANG, WENG YIAO, CHIANG PANG-MING, HUANG JEN-RONG, DU CHENUNG
Year of Publication 04.04.2006
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Year of Publication 04.04.2006
Patent
SYSTEM AND METHOD FOR PLASMA ENHANCED THIN FILM DEPOSITION
LIANG MUH-WANG, WU CHING-HUEI, CHANG CHIHN, LEE SHENG-LANG, HUANG JEN-RONG, DU CHENUNG, LO CHAN-HSING
Year of Publication 09.04.2009
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Year of Publication 09.04.2009
Patent