Extreme ultraviolet light source, radiation source and device thereof
ZHENG BOZHONG, YANG JI, ZHANG JUNKAI, LIU YUDE, JIANG YUSHENG, HUANG QINGJUN
Year of Publication 29.07.2022
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Year of Publication 29.07.2022
Patent
Extreme ultraviolet source, method for improving asymmetric deposition and radiation source
ZHENG BOZHONG, YANG JI, ZHANG JUNKAI, LIU YUDE, JIANG YUSHENG, HUANG QINGJUN
Year of Publication 01.07.2022
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Year of Publication 01.07.2022
Patent
Trackless triangular hanging basket automatic walking device
ZHENG BOZHONG, CHEN GANG, RAO WEIREN, XUE XUTAO, NIU YOULONG, LIU DE, WU QIUPENG
Year of Publication 13.09.2022
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Year of Publication 13.09.2022
Patent
Track-beam-free triangular hanging basket device
LU YANGYI, LIU SHU, LI SHIPING, ZHENG BOZHONG, XU JIE, LIU JIN, QUE ZHENGYI
Year of Publication 05.07.2022
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Year of Publication 05.07.2022
Patent
Automatic operation method for hanging basket cantilever construction inner mold
ZHENG BOZHONG, FENG XIAO, SU DAN, LIU JIN, ZHU JINYING, MENG FANKAI, ZENG LIXING, XUE XUTAO, FENG JINGCHEN
Year of Publication 28.12.2021
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Year of Publication 28.12.2021
Patent
Photoetching device and photoetching method
ZHENG BOZHONG, ZHANG JUNLIN, ZHANG HANLONG, LIU BAICUN, CHEN LIRUI, FU ZHONGQI
Year of Publication 03.03.2020
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Year of Publication 03.03.2020
Patent
Bridge cantilever construction hanging basket walking system and operation method
ZHENG BOZHONG, ZHU YIHUAN, XU JIE, FENG XIAO, LIU JIN, ZHU JINYING, LIU YUYU, FENG JINGCHEN, XUE XUTAO, QUE ZHENGYI, ZHANG QUNFENG, LI XIANG
Year of Publication 04.01.2022
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Year of Publication 04.01.2022
Patent
Method for detecting cleanliness of photoetching equipment and reflective photomask
ZHENG BOZHONG, LI ZONGYAN, GUO JUEQI, ZHENG JIEREN, CHEN LIRUI, FU ZHONGQI
Year of Publication 21.02.2020
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Year of Publication 21.02.2020
Patent
Laser system and lithographic apparatus
YI WEITING, ZHENG BOZHONG, ZHANG JUNLIN, LIU BAICUN, CHEN ZHENGHONG, CHEN LIRUI, FU ZHONGQI
Year of Publication 21.02.2020
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Year of Publication 21.02.2020
Patent
Device and method for cleaning light collection mirror of photoetching device
ZHENG BOZHONG, CHEN JIAZHEN, LUO SHAOWEI, ZHONG RENYANG, WU SHANGYING, CHEN LIRUI, JIAN SHANGJIE
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
Patent