Method of forming an interconnect structure diffusion barrier with high nitrogen content
KIM HYUNGJUN, KALDOR STEFFEN K, ROSSNAGEL STEPHEN M, CABRAL, JR. CYRIL
Year of Publication 27.05.2008
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Year of Publication 27.05.2008
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EIN VERFAHREN ZUR ABSCHEIDUNG EINER METALLSCHICHT AUF EINER HALBLEITER-INTERKONNEKTSTRUKTUR MIT EINER DECKSCHICHT
DALTON, TIMOTHY, SIMON, ANDREW, YANG, CHIHAO, CLEVENGER, LARRY, SEO, SOONON, WANG, YUN-YU, KALDOR, STEFFEN, KUMAR, KAUSHIK, HOINKIS, MARK, LA TULIPE, DOUGLAS, YANG, HAINING
Year of Publication 15.06.2010
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Year of Publication 15.06.2010
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Apparatus and method for flattening a warped substrate
MURRAY CONAL E, FAYAZ MOHAMMED F, KALDOR STEFFEN K, NOYAN ISMAIL C, PETROSKY ANNE L
Year of Publication 08.05.2007
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Year of Publication 08.05.2007
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Interconnect structure diffusion barrier with high nitrogen content
KIM HYUNGJUN, KALDOR STEFFEN K, ROSSNAGEL STEPHEN M, CABRAL, JR. CYRIL
Year of Publication 29.08.2006
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Year of Publication 29.08.2006
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Apparatus and method for flattening a warped substrate
MURRAY CONAL E, FAYAZ MOHAMMED F, KALDOR STEFFEN K, NOYAN ISMAIL C, PETROSKY ANNE L
Year of Publication 16.03.2006
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Year of Publication 16.03.2006
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A METHOD FOR DEPOSITING A METAL LAYER ON A SEMICONDUCTOR INTERCONNECT STRUCTURE HAVING A CAPPING LAYER
DALTON, TIMOTHY, SIMON, ANDREW, YANG, CHIHAO, CLEVENGER, LARRY, SEO, SOONON, WANG, YUN-YU, KALDOR, STEFFEN, KUMAR, KAUSHIK, LA TULIPE, DOUGLAS, JR, HOINKIS, MARK, YANG, HAINING
Year of Publication 02.06.2010
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Year of Publication 02.06.2010
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Bilayered metal hardmasks for use in dual damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 10.07.2007
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Year of Publication 10.07.2007
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Zweischichtige Metallhartmasken zur Verwendung in Dual-Damascene-Ätzschemata und Verfahren zur Bereitstellung der Metallhartmasken
LA TULIPE, DOUGLAS C, SCHACHT, JOCHEN, YANG, CHIHAO, CLEVENGER, LARRY, DALTON, TIMOTHY J, KALDOR, STEFFEN, KUMAR, KAUSHIK, KALTALIOGLU, ERDEM, HOINKIS, MARK, COWLEY, ANDY, SIMON, ANDREW H
Year of Publication 10.08.2006
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Year of Publication 10.08.2006
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Bilayered metal hardmasks for use in dual damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 01.06.2006
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Year of Publication 01.06.2006
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Bilayered metal hardmasks for use in Dual Damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 30.05.2006
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Year of Publication 30.05.2006
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Method for depositing a metal layer on a semiconductor interconnect structure having a capping layer
SEO SOONON, YANG HAINING, KUMAR KAUSHIK, SIMON ANDREW HERBERT, HOINKIS MARK, LA TULIPE, JR. DOUGLAS C, KALDOR STEFFEN K, WANG YUN-YU, DALTON TIMOTHY JOSEPH, CLEVENGER LARRY, YANG CHIHAO
Year of Publication 10.07.2007
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Year of Publication 10.07.2007
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Back end interconnect with a shaped interface
COWLEY ANDREW P, SIMON ANDREW H, SPOONER TERRY A, SCHACHT JOCHEN, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, WANG YUN-YU, DALTON TIMOTHY J, KALTALIOGLU ERDEM, WANN CLEMENT H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE, JR. DOUGLAS C, YANG CHIHAO
Year of Publication 24.02.2009
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Year of Publication 24.02.2009
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A method for depositing a metal layer on a semiconductor interconnect structure having a capping layer
CLEVENGER LARRY,DALTON TIMOTHY,HOINKIS MARK,KALDOR STEFFEN,KUMAR KAUSHIK,LA TULIPE DOUGLAS JR.,SEO SOONON,SIMON ANDREW,WANG YUN-YU,YANG CHIHAO,YANG HAINING
Year of Publication 16.05.2007
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Year of Publication 16.05.2007
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