Workpiece handling scan arm for ion implantation system
PHARAND, MICHEL, MITCHELL, ROBERT, ARSENAULT, WAYNE, LAFONTAINE, MARVIN, WEED, STEVEN, EIRIKSSON, ARI, PATHAK, SHANTANU, BECKEL, DONOVAN, PUROHIT, ASHWIN
Year of Publication 11.02.2014
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Year of Publication 11.02.2014
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Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure
SMITH DANIEL GENE, PHARAND MICHEL, STAMPER BRIAN L, COOPER ALEXANDER, WILLIAMSON DAVID MICHAEL, GOODWIN ERIC PETER, ROBERTSON ALEC
Year of Publication 21.08.2013
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Year of Publication 21.08.2013
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Low-cost electrostatic clamp with fast declamp time
PHARAND, MICHEL, RUBIN, LEONARD MICHAEL, LAFONTAINE, MARVIN RAYMOND, BECKER, KLAUS
Year of Publication 01.03.2009
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Year of Publication 01.03.2009
Patent
Workpiece handling scan arm for ion implantation system
PATHAK SHANTANU, PHARAND MICHEL, LAFONTAINE MARVIN, MITCHELL ROBERT, EIRIKSSON ARI, ARSENAULT WAYNE, PUROHIT ASHWIN, WEED STEVE, BECKEL DONOVAN
Year of Publication 07.09.2011
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Year of Publication 07.09.2011
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Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current drag
PHARAND, MICHEL, BJORK, MATT, KHO, LEONARD WAI FUNG, COON, DEREK, COOPER, ALEXANDER, COAKLEY, SCOTT, TOTSU, MASAHIRO, POON, ALEX KA TIM, BINNARD, MICHAEL B, KESWANI, GAURAV
Year of Publication 16.07.2012
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Year of Publication 16.07.2012
Patent
Workpiece handling scan arm for ion implantation system
PATHAK SHANTANU, PHARAND MICHEL, LAFONTAINE MARVIN, MITCHELL ROBERT, EIRIKSSON ARI, PUROHIT ASHWIN, ARSENAULT WAYNE, WEED STEVE, BECKEL DONOVAN
Year of Publication 26.08.2009
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Year of Publication 26.08.2009
Patent
Workpiece handling scan arm for ion implantation system
PHARAND, MICHEL, MITCHELL, ROBERT, ARSENAULT, WAYNE, LAFONTAINE, MARVIN, WEED, STEVEN, EIRIKSSON, ARI, PATHAK, SHANTANU, BECKEL, DONOVAN, PUROHIT, ASHWIN
Year of Publication 01.06.2008
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Year of Publication 01.06.2008
Patent
APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE
SMITH DANIEL GENE, PHARAND MICHEL, STAMPER BRIAN L, COOPER ALEXANDER, WILLIAMSON DAVID MICHAEL, GOODWIN ERIC PETER, ROBERTSON ALEC
Year of Publication 27.09.2013
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Year of Publication 27.09.2013
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