Low temperature process for forming a silicon-containing thin layer
JEONG, HEON JONG, PARK, SUN KYUNG, YUN, SU HYONG, HIMA KUMAR LINGAM, CHOI, YUN JUNG, YOO, SEUNG HO, SUH, DAE WOONG
Year of Publication 03.08.2017
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Year of Publication 03.08.2017
Patent
Low Temperature Process for Forming Silicon-Containing Thin Layer
Lingam, Hima Kumar, Yun, Suhyong, Choi, Yunjung, Suh, Daewoong, Yoo, Seung Ho, Park, Sun Kyung, Jeong, Heonjong
Year of Publication 27.12.2018
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Year of Publication 27.12.2018
Patent