Design, fabrication and testing of a serial kinematic MEMS XY stage for multifinger manipulation
Kim, Yong-Sik, Yoo, Jae-Myung, Yang, Seung Ho, Choi, Young-Man, Dagalakis, Nicholas G, Gupta, Satyandra K
Published in Journal of micromechanics and microengineering (01.08.2012)
Published in Journal of micromechanics and microengineering (01.08.2012)
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Journal Article
DYNAMIC COOLING CONTROL FOR THERMAL STABILIZATION FOR LITHOGRAPHY SYSTEM
TAO WEIMIN, MANENS ANTOINE P, CORRIVEAU DAVID MICHAEL, JOHNSTON BENJAMIN M, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 27.08.2024
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Year of Publication 27.08.2024
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증가된 디지털 포토리소그래피 정밀도를 위한 브릿지 보강재들
SRIRANGARAJAN VASUMAN GHANAPAATI, LEE CHEUK, FUNG PRESTON, ARELLANO JORGE, CORRIVEAU DAVID, JOHNSTON BENJAMIN M, YOO JAE MYUNG
Year of Publication 30.01.2024
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Year of Publication 30.01.2024
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METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
FUNG PRESTON, JOHNSTON BENJAMIN M, SCREWS SEAN, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 09.01.2023
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Year of Publication 09.01.2023
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평면 패널 툴에 기판을 신속하게 로딩하기 위한 방법
FUNG PRESTON, JOHNSTON BENJAMIN M, SCREWS SEAN, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 08.02.2021
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Year of Publication 08.02.2021
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리소그래피 시스템을 위한 열 안정화를 위한 동적 냉각 제어
TAO WEIMIN, MANENS ANTOINE P, CORRIVEAU DAVID MICHAEL, JOHNSTON BENJAMIN M, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 05.10.2021
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Year of Publication 05.10.2021
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Displacement sensor for detecting sub-micrometer motion
Avramov-Zamurovic, S., Jae Myung Yoo, Dagalakis, N. G., Rae Duk Lee
Published in 2012 Conference on Precision electromagnetic Measurements (01.07.2012)
Published in 2012 Conference on Precision electromagnetic Measurements (01.07.2012)
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Conference Proceeding
Embedded capacitive displacement sensor for nanopositioning applications
Avramov-Zamurovic, S, Dagalakis, N G, Rae Duk Lee, Yong Sik Kim, Jae Myung Yoo, Seung Ho Yang
Published in CPEM 2010 (01.06.2010)
Published in CPEM 2010 (01.06.2010)
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Conference Proceeding
Capacitive displacement sensor for detecting planar submicrometer motion
Avramov-Zamurovic, Svetlana, Yoo, Jae Myung, Dagalakis, Nicholas G
Published in Review of scientific instruments (01.06.2016)
Published in Review of scientific instruments (01.06.2016)
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Journal Article
Method for fast loading substrates in a flat panel tool
Lee, Cheuk Ming, Johnston, Benjamin M, Yoo, Jae Myung, Fung, Preston, Screws, Sean
Year of Publication 13.08.2024
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Year of Publication 13.08.2024
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BRIDGE STIFFENERS FOR INCREASED DIGITAL PHOTOLITHOGRAPHY PRECISION
JOHNSTON, Benjamin M, YOO, Jae Myung, ARELLANO, Jorge, CORRIVEAU, David, SRIRANGARAJAN, Vasuman Ghanapaati, FUNG, Preston, LEE, Cheuk
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
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METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
JOHNSTON, Benjamin M, YOO, Jae Myung, SCREWS, Sean, FUNG, Preston, LEE, Cheuk Ming
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
Patent
Method for fast loading substrates in a flat panel tool
Lee, Cheuk Ming, Johnston, Benjamin M, Yoo, Jae Myung, Fung, Preston, Screws, Sean
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
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Dynamic cooling control for thermal stabilization for lithography system
Lee, Cheuk Ming, Johnston, Benjamin M, Yoo, Jae Myung, Tao, WeiMin, Manens, Antoine P, Corriveau, David Michael
Year of Publication 18.05.2021
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Year of Publication 18.05.2021
Patent
METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
JOHNSTON, Benjamin M, YOO, Jae Myung, SCREWS, Sean, FUNG, Preston, LEE, Cheuk Ming
Year of Publication 02.04.2020
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Year of Publication 02.04.2020
Patent