Investigations of semiconductor devices using SIMS; diffusion, contamination, process control
Lee, Jae Cheol, Won, Jeongyeon, Chung, Youngsu, Lee, Hyungik, Lee, Eunha, Kang, Donghun, Kim, Changjung, Choi, Jinhak, Kim, Jeomsik
Published in Applied surface science (15.12.2008)
Published in Applied surface science (15.12.2008)
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