Crystallographic modification of hard mask properties
COWLEY ANDREW P, SIMON ANDREW H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE, JR. DOUGLAS C, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, ROSSNAGEL STEPHEN M, DALTON TIMOTHY J
Year of Publication 21.02.2006
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Year of Publication 21.02.2006
Patent
Crystallographic Modification of Hard mask Properties
COWLEY ANDREW P, SIMON ANDREW H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE DOUGLAS C.JR, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, ROSSNAGEL STEPHEN M, DALTON TIMOTHY J
Year of Publication 26.05.2005
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Year of Publication 26.05.2005
Patent