High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction
Cooper, David, Bernier, Nicolas, Rouvière, Jean-Luc, Wang, Yun-Yu, Weng, Weihao, Madan, Anita, Mochizuki, Shogo, Jagannathan, Hemanth
Published in Applied physics letters (29.05.2017)
Published in Applied physics letters (29.05.2017)
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Journal Article
Low-Temperature Oxide Wafer Bonding for 3-D Integration: Chemistry of Bulk Oxide Matters
Wei Lin, Shi, Leathen, Yiping Yao, Madan, Anita, Pinto, Teresa, Zavolas, Nick, Murphy, Richard, Skordas, Spyridon, Iyer, Subramanian
Published in IEEE transactions on semiconductor manufacturing (01.08.2014)
Published in IEEE transactions on semiconductor manufacturing (01.08.2014)
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Journal Article
SIMS quantification of SiGe composition with low-energy ion beams
Zhu, Zhengmao, Ronsheim, Paul, Turansky, Andrew, Hatzistergos, Michael, Madan, Anita, Pinto, Teresa, Holt, Judson, Reznicek, Alexander
Published in Surface and interface analysis (01.01.2011)
Published in Surface and interface analysis (01.01.2011)
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Journal Article
Conference Proceeding
Modeling and acoustic microscopy measurements for evaluation of the adhesion between a film and a substrate
Guo, Zhiqi, Achenbach, J.D., Madan, Anita, Martin, Keith, Graham, M.E.
Published in Thin solid films (15.08.2001)
Published in Thin solid films (15.08.2001)
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Journal Article
Modeling and acoustic microscopy measurements for evaluation of the adhesion between a film and a substrate
ZHIQI GUO, ACHENBACH, J. D, MADAN, Anita, MARTIN, Keith, GRAHAM, M. E
Published in Thin solid films (15.08.2001)
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Published in Thin solid films (15.08.2001)
Journal Article
Production and performance of multilayer-coated conical x-ray mirrors
Ulmer, Melville P, Altkorn, Robert, Graham, Michael E, Madan, Anita, Chu, Yong S
Published in Applied optics (2004) (01.12.2003)
Published in Applied optics (2004) (01.12.2003)
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Journal Article
Integration of modeling and acoustic microscopy measurements for thin films
Guo, Z, Achenbach, JD, Madan, A, Martin, K, Graham, ME
Published in The Journal of the Acoustical Society of America (01.05.2000)
Published in The Journal of the Acoustical Society of America (01.05.2000)
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Journal Article
Capacitance monitoring using x-ray diffraction
Kang, Donghun, Kwon, Oh-jung, Madan, Anita, Murray, Conal E, Kohli, Kriteshwar K
Year of Publication 26.06.2018
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Year of Publication 26.06.2018
Patent
CAPACITANCE MONITORING USING X-RAY DIFFRACTION
Kang Donghun, Kwon Oh-jung, Murray Conal E, Kohli Kriteshwar K, Madan Anita
Year of Publication 05.04.2018
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Year of Publication 05.04.2018
Patent
Capacitance monitoring using X-ray diffraction
Kang Donghun, Kwon Oh-jung, Murray Conal E, Kohli Kriteshwar K, Madan Anita
Year of Publication 16.01.2018
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Year of Publication 16.01.2018
Patent
CAPACITANCE MONITORING USING X-RAY DIFFRACTION
KOHLI KRITESHWAR K, MURRAY CONAL E, KWON OH-JUNG, KANG DONGHUN, MADAN ANITA
Year of Publication 23.06.2016
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Year of Publication 23.06.2016
Patent
Dislocation engineering using a scanned laser
SCHWARZ KLAUS W, SCOTT J. CAMPBELL, LAI CHUNG WOH, MADAN ANITA, LIU XIAO HU
Year of Publication 21.10.2014
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Year of Publication 21.10.2014
Patent
Dislocation engineering using a scanned laser
SCHWARZ KLAUS W, SCOTT J. CAMPBELL, LAI CHUNG WOH, MADAN ANITA, LIU XIAO HU
Year of Publication 21.10.2014
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Year of Publication 21.10.2014
Patent
Measurement of CMOS device channel strain by X-ray diffraction
ADAM THOMAS N, MURRAY CONAL E, HARLEY ERIC C, PINTO TERESA L, HOLT JUDSON R, MADAN ANITA, BEDELL STEPHEN W
Year of Publication 06.05.2014
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Year of Publication 06.05.2014
Patent
MEASUREMENT OF CMOS DEVICE CHANNEL STRAIN BY X-RAY DIFFRACTION
ADAM THOMAS N, MURRAY CONAL E, HARLEY ERIC C, PINTO TERESA L, HOLT JUDSON R, MADAN ANITA, BEDELL STEPHEN W
Year of Publication 14.06.2012
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Year of Publication 14.06.2012
Patent