Flow property measurement for nanoimprint simulation
Lévéder, Tanguy, Landis, Stéfan, Davoust, Laurent, Chaix, Nicolas
Published in Microelectronic engineering (2007)
Published in Microelectronic engineering (2007)
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Journal Article
Optimization of demolding temperature for throughput improvement of nanoimprint lithography
Leveder, T., Landis, S., Davoust, L., Chaix, N.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
Conference Proceeding
SYSTEM FOR MEASURING TANGENTIAL FORCE APPLIED BY A FLUID WITH INCREASED SENSITIVITY
LEVEDER, Tanguy, GORINTIN, Louis, ROBERT, Philippe, COUTIER, Caroline
Year of Publication 20.04.2016
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Year of Publication 20.04.2016
Patent