Equipment diagnosis system and method based on deep learning
Park, Won-ki, Zhang, Byoung-tak, Jang, Young-il, Oh, Kyoung-whan, Lee, Ho-youl, Seo, Jong-hwi, Kwak, Ha-nock, Choi, Seong-ho
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Year of Publication 08.03.2022
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METHOD OF CLEANING SEMICONDUCTOR EQUIPMENT AND SEMICONDUCTOR EQUIPMENT MANAGEMENT SYSTEM
Oh, Yun-Sek, Park, Won-Ki, Park, Su-Man, Jang, Young-Il, Oh, Kyoung-Whan, Lee, Ho-Youl
Year of Publication 28.05.2020
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Year of Publication 28.05.2020
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Method of determining position of fault of equipment using sound source inputting apparatus and system of determining position of fault of equipment for performing the same
Choi, Yeon-Woo, Park, Won-Ki, Choi, Yong-Won, Jang, Young-Il, Oh, Kyoung-Whan, Ko, Won-Yup, Lee, Ho-Youl
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
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Substrate transporting apparatus and method of operating the same
Yuk, Nam-Su, Park, Ju-No, Eom, Jae-Young, Jeong, Jae-Won, Lee, Ho-Youl
Year of Publication 15.05.2018
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Year of Publication 15.05.2018
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EQUIPMENT DIAGNOSIS SYSTEM AND METHOD BASED ON DEEP LEARNING
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Year of Publication 03.10.2019
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Year of Publication 03.10.2019
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METHOD OF DETERMINING POSITION OF FAULT OF EQUIPMENT USING SOUND SOURCE INPUTTING APPARATUS AND SYSTEM OF DETERMINING POSITION OF FAULT OF EQUIPMENT FOR PERFORMING THE SAME
OH, Kyoung-Whan, PARK, Won-Ki, CHOI, Yeon-Woo, LEE, Ho-Youl, CHOI, Yong-Won, JANG, Young-IL, KO, Won-Yup
Year of Publication 09.05.2019
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Year of Publication 09.05.2019
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Equipment diagnosis system and method based on deep learning
KWAK HA-NOCK, OH KYOUNG-WHAN, LEE HO-YOUL, PARK WON-KI, ZHANG BYOUNG-TAK, CHOI SEONG-HO, JANG YOUNG-IL, SEO JONG-HWI
Year of Publication 15.10.2019
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Year of Publication 15.10.2019
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Equipment diagnosis system and method based on deep learning
KWAK HA NOCK, JANG YOUNG IL, PARK WON KI, CHOI SEONG HO, SEO JONG HWI, ZHANG BYOUNG TAK, OH KYOUNG WHAN, LEE HO YOUL
Year of Publication 10.10.2019
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Year of Publication 10.10.2019
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