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Year of Publication 07.08.2018
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Year of Publication 16.08.2016
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Year of Publication 24.11.2016
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Apparatus for cleaning photomask
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Year of Publication 01.09.2015
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Year of Publication 01.09.2015
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Method of megasonic cleaning of an object
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Year of Publication 21.06.2016
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Year of Publication 21.06.2016
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PHOTOMASK AND METHOD OF MANUFACTURING THE SAME
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Year of Publication 08.01.2015
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Year of Publication 08.01.2015
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Photomasks and methods of manufacturing the same
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Year of Publication 22.07.2014
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Year of Publication 22.07.2014
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APPARATUS FOR CLEANING PHOTOMASK
HAN SUNG-JAE, KO HYUNG-HO, KIM KYUNG-NOH, JEON CHAN-UK, JEONG YUN-SONG
Year of Publication 25.07.2013
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Year of Publication 25.07.2013
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Method and apparatus for cleaning photomask
HAN SUNG-JAE, KO HYUNG-HO, KIM KYUNG-NOH, JEON CHAN-UK, JEONG YUN-SONG
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Year of Publication 09.04.2013
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PHOTOMASKS AND METHODS OF MANUFACTURING THE SAME
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Year of Publication 14.06.2012
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Year of Publication 14.06.2012
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MEGASONIC WASHING METHOD AND WASHING APPARATUS
OH JONG-KEUN, KIM WON-JUNG, KIN KOEI, KO HYUNG-HO, JEON CHAN-UK, CHOI JAE-HYUCK, PARK KEUN-HWAN
Year of Publication 15.12.2011
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Year of Publication 15.12.2011
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METHOD OF MEGASONIC CLEANING OF AN OBJECT
OH JONG-KEUN, KIM WON-JUNG, KO HYUNG-HO, JEON CHAN-UK, KIM HO-YOUNG, CHOI JAE-HYUCK, PARK KEUN-HWAN
Year of Publication 10.01.2013
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Year of Publication 10.01.2013
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