Large-scale freestanding nanometer-thick graphite pellicles for mass production of nanodevices beyond 10 nm
Kim, Seul-Gi, Shin, Dong-Wook, Kim, Taesung, Kim, Sooyoung, Lee, Jung Hun, Lee, Chang Gu, Yang, Cheol-Woong, Lee, Sungjoo, Cho, Sang Jin, Jeon, Hwan Chul, Kim, Mun Ja, Kim, Byung-Gook, Yoo, Ji-Beom
Published in Nanoscale (21.09.2015)
Published in Nanoscale (21.09.2015)
Get full text
Journal Article
Process Technology for Next Generation Photomask
Sohn, Jung-Min, Kim, Byung-Gook, Choi, Sung-Woon, Kim, Jin-Min, Cha, Byung-Cheol, Yoon, Hee-Sun
Published in Japanese Journal of Applied Physics (01.12.1998)
Published in Japanese Journal of Applied Physics (01.12.1998)
Get full text
Journal Article
STORAGE DEVICE SHARING DATA ENCRYPTION KEY AS ENCRYPTED AND OPERATING METHOD OF STORAGE DEVICE
KIM BYUNG GOOK, LEE SEUNG JAE, LEE MYEONGJONG, HONG SEOKGI, KIM JISOO, KWON JINTAEK, HONG HYUNSOOK
Year of Publication 05.06.2020
Get full text
Year of Publication 05.06.2020
Patent
Lithography method using multi-scale simulation and semiconductor manufacturing method and exposure equipment based on the lithography method
CHOI JOON MYUNG, KIM BYUNG GOOK, LEE HYUNG WOO, MOON JUNG HWAN, JEONG CHANG YOUNG, KIM MU YOUNG, CHO MAENG HYO, PARK SUNG WOO, LEE BYUNG HOON
Year of Publication 03.02.2021
Get full text
Year of Publication 03.02.2021
Patent
Pellicle and photomask assembly including the same
JUNG, YONG SEOK, KIM, BYUNG GOOK, JEON, HWAN CHUL, KWON, SUNG WON, CHOI, JAE HYUCK
Year of Publication 13.02.2017
Get full text
Year of Publication 13.02.2017
Patent
APPARATUS FOR LITHOGRAPY AND EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
KIM, EOK BONG, PARK, JONG JU, KIM, BYUNG GOOK, KIM, MUN JA, LEE, DONG GUN
Year of Publication 09.02.2017
Get full text
Year of Publication 09.02.2017
Patent
OPERATION METHOD OF STORAGE MEDIUM OPERATION METHOD OF HOST CONTROLLING STORAGE MEDIUM AND OPERATION METHOD OF USER SYSTEM INCLUDING STORAGE MEDIUM AND HOST
CHOI, BONG JUN, KIM, BYUNG GOOK, PARK, JIN HWAN, KIM, KYUNG HO, KANG, PIL SUNG, KIM, CHAN SOL, HWANG, TAE SEOK, KIM, JI SOO, YU, CHAE WON, LEE, SO JEONG
Year of Publication 05.01.2018
Get full text
Year of Publication 05.01.2018
Patent
Methods of manufacturing pellicle assembly and photomask assembly including the same
YOO, JI BEOM, KIM, SOO YOUNG, KIM, BYUNG GOOK, KIM, TAE SUNG, JEON, HWAN CHUL, KIM, MUN JA, SHIN, DONG WOOK
Year of Publication 14.12.2016
Get full text
Year of Publication 14.12.2016
Patent