COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS INCOUDING STEP OF REMOVING EDGE BEAD USING THE COMPOSITION
HEO RYUNMIN, HAN DASOM, KIM MINSOO, LEE MINYOUNG, KIM JAEHYUN, LEE DONGHYUNG, MOON HYUNGRANG, KU JAMIN
Year of Publication 17.02.2023
Get full text
Year of Publication 17.02.2023
Patent
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS INCOUDING STEP OF REMOVING EDGE BEAD USING THE COMPOSITION
HEO RYUNMIN, HAN DASOM, KIM MINSOO, LEE MINYOUNG, KIM JAEHYUN, LEE DONGHYUNG, MOON HYUNGRANG, KU JAMIN
Year of Publication 17.02.2023
Get full text
Year of Publication 17.02.2023
Patent
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL-CONTAINING RESISTS, AND METHOD OF FORMING PATTERNS INCLUDING STEP OF REMOVING EDGE BEAD USING SAME
HEO, Ryunmin, KU, Jamin, KIM, Jaehyun, LEE, Donghyung, HAN, Dasom, MOON, Hyungrang, KIM, Minsoo, LEE, Minyoung
Year of Publication 16.02.2023
Get full text
Year of Publication 16.02.2023
Patent
COMPOSITION FOR REMOVING EDGE BEAD OF METAL-CONTAINING RESIST, AND METHOD FOR FORMING PATTERN COMPRISING STEP OF REMOVING EDGE BEAD BY USING SAME
HEO, Ryunmin, KU, Jamin, KIM, Jaehyun, LEE, Donghyung, HAN, Dasom, MOON, Hyungrang, KIM, Minsoo, LEE, Minyoung
Year of Publication 16.02.2023
Get full text
Year of Publication 16.02.2023
Patent
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS INCOUDING STEP OF REMOVING EDGE BEAD USING THE COMPOSITION
HEO RYUNMIN, HAN DASOM, KIM MINSOO, PARK HYEON, LEE MINYOUNG, KIM JAEHYUN, LEE DONGHYUNG, MOON HYUNGRANG, NAMGUNG RAN, KU JAMIN
Year of Publication 12.06.2023
Get full text
Year of Publication 12.06.2023
Patent
COMPOSITION FOR REMOVING EDGE BEAD OF METAL-CONTAINING RESIST, AND METHOD FOR FORMING PATTERN COMPRISING STEP OF REMOVING EDGE BEAD BY USING SAME
HEO, Ryunmin, KU, Jamin, KIM, Jaehyun, LEE, Donghyung, HAN, Dasom, MOON, Hyungrang, KIM, Minsoo, LEE, Minyoung
Year of Publication 03.10.2024
Get full text
Year of Publication 03.10.2024
Patent