Integration of a Manufacturing Grade, k = 2.0 Spin-On Material in a Single Damascene Structure
Volksen, Willi, Purushothaman, Sampath, Darnon, Maxime, Lofaro, Mike F., Cohen, Stephan A., Doyle, James P., Fuller, Nicholas, Magbitang, Teddie P., Rice, Philip M., Krupp, Leslie E., Nakagawa, Hisashi, Nobe, Youhei, Kokubo, Terukazu, Dubois, Geraud J. M.
Published in ECS journal of solid state science and technology (01.01.2012)
Published in ECS journal of solid state science and technology (01.01.2012)
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