극자외선 리소그래피 패터닝 방법
KATO YOSHIHIRO, LEE CHOONGMAN, RALEY ANGELIQUE, LOU QIAOWEI, HASEGAWA TOSHIO, CHAE SOO DOO
Year of Publication 04.04.2024
Get full text
Year of Publication 04.04.2024
Patent
상호 접속 구조체 및 그 형성 방법
LEUSINK GERRIT J, YU KAI HUNG, SMITH JEFFREY, CHAE SOO DOO, CLARK ROBERT D
Year of Publication 29.08.2019
Get full text
Year of Publication 29.08.2019
Patent
METHOD OF MANUFACTURING INTEGRATED CIRCUIT HAVING DOUBLE METAL POWER RAIL
MAEKAWA KAORU, NICHOLAS JOY, SMITH GEOFFREY, CHAE SOO DOO, GERRIT J LEUSINK, YU KAI-HUNG
Year of Publication 27.12.2018
Get full text
Year of Publication 27.12.2018
Patent
METHOD OF INTEGRATED CIRCUIT FABRICATION WITH DUAL METAL POWER RAIL
MAEKAWA KAORU, LEUSINK GERRIT J, JOY NICHOLAS, YU KAI HUNG, SMITH JEFFREY, CHAE SOO DOO
Year of Publication 14.12.2018
Get full text
Year of Publication 14.12.2018
Patent
WRAP-AROUND CONTACT INTEGRATION SCHEME
MAEKAWA KAORU, NAKAMURA SATOSHI, KO AKITERU, KANDABARA N TAPILY, CHAE SOO DOO, GERRIT J LEUSINK
Year of Publication 15.03.2018
Get full text
Year of Publication 15.03.2018
Patent
WRAP-AROUND CONTACT INTEGRATION SCHEME
MAEKAWA KAORU, TAPILY KANDABARA N, KO AKITERU, CHAE, SOO DOO, LEUSINK GERRIT J, NAKAMURA SATORU
Year of Publication 15.03.2018
Get full text
Year of Publication 15.03.2018
Patent
빔 프로세싱 시스템에서 빔 스캔 크기 및 빔 위치를 사용하여 높은 처리량을 위한 방법
CALIENDO STEVEN P, RUSSELL NOEL, JOY NICHOLAS, LEITH ALLEN J, CHAE SOO DOO, LAROSE JOSHUA, FERNANDEZ LUIS, SHAO YAN, LAGANA GIZZO VINCENT
Year of Publication 27.04.2018
Get full text
Year of Publication 27.04.2018
Patent