Performance of pupil-filtering stepper-lens system
Fukuda, H., Kobayashi, Y., Tawa, T., Okazaki, S.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Journal Article
Conference Proceeding
Improved alignment accuracy using lens-distortion correction for electron-beam lithography in mix-and-match with an optical stepper
GOTOH, Y, NAKAYAMA, Y, MATSUZAKA, T, SAITOU, N, HOJYO, Y, KAWAHARA, T, TAWA, T
Published in Japanese Journal of Applied Physics (01.12.1997)
Published in Japanese Journal of Applied Physics (01.12.1997)
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Conference Proceeding
Journal Article
Evaluation of pupil-filtering in high-numerical aperture I-line lens
FUKUDA, H, KOBAYASHI, Y, HAMA, K, TAWA, T, OKAZAKI, S
Published in Japanese Journal of Applied Physics (01.12.1993)
Published in Japanese Journal of Applied Physics (01.12.1993)
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Conference Proceeding
Journal Article
The effect of condenser tilt on optical projection lithography
TERASAWA, T, HAMA, K, TAWA, T, KATAGIRI, S
Published in Japanese Journal of Applied Physics (01.06.1991)
Published in Japanese Journal of Applied Physics (01.06.1991)
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Journal Article
Characterization of super-resolution photolithography
Fukuda, Yamanaka, Terasawa, Hama, Tawa, Okazaki
Published in 1992 International Technical Digest on Electron Devices Meeting (1992)
Published in 1992 International Technical Digest on Electron Devices Meeting (1992)
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Conference Proceeding