Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2
TSUTSUI, Kazuo, RUIFEI XIANG, NAGAHIRO, Koji, SHIOZAWA, Takashi, AHMET, Parhat, OKUNO, Yasutoshi, MATSUMOTO, Michikazu, KUBOTA, Masafumi, KAKUSHIMA, Kuniyuki, IWAI, Hiroshi
Published in Microelectronic engineering (01.02.2008)
Published in Microelectronic engineering (01.02.2008)
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Published in Solid state phenomena (14.08.2023)
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Published in ECS journal of solid state science and technology (01.08.2023)
Published in ECS journal of solid state science and technology (01.08.2023)
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Amorphous SiO 2 Surface Irregularities and their Influence on Liquid Molecule Adsorption by Molecular Dynamics Analysis
Takayanagi, Masayoshi, Fujiwara, Naozumi, Seki, Ryuichi, Sato, Masanobu, Okuno, Yasutoshi
Published in ECS journal of solid state science and technology (01.08.2023)
Published in ECS journal of solid state science and technology (01.08.2023)
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Published in Japanese Journal of Applied Physics (01.06.1993)
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Published in 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (12.06.2022)
Published in 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (12.06.2022)
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Stress Memorization Technique-Fundamental Understanding and Low-Cost Integration for Advanced CMOS Technology Using a Nonselective Process
Ortolland, C., Okuno, Y., Verheyen, P., Kerner, C., Stapelmann, C., Aoulaiche, M., Horiguchi, N., Hoffmann, T.
Published in IEEE transactions on electron devices (01.08.2009)
Published in IEEE transactions on electron devices (01.08.2009)
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Kaneko, Tadaaki, Asahi, Hajime, Okuno, Yasutoshi, Kang, Tae Won, Gonda, Shun-ichi
Published in Journal of crystal growth (01.10.1990)
Published in Journal of crystal growth (01.10.1990)
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Selective area epitaxy of GaSb by metal-organic molecular beam epitaxy
LIU, X, ASAHI, H, OKUNO, Y, INOUE, K, GONDA, S.-I
Published in Japanese Journal of Applied Physics (1993)
Published in Japanese Journal of Applied Physics (1993)
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Atomic ordering effect on SiGe electronic structure
Yen-Tien Tung, Chen, Edward, Tzer-Min Shen, Okuno, Yasutoshi, Chung-Cheng Wu, Wu, Jeff, Diaz, Carlos H.
Published in 2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01.09.2014)
Published in 2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01.09.2014)
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Conference Proceeding
Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi 2
Tsutsui, Kazuo, Xiang, Ruifei, Nagahiro, Koji, Shiozawa, Takashi, Ahmet, Parhat, Okuno, Yasutoshi, Matsumoto, Michikazu, Kubota, Masafumi, Kakushima, Kuniyuki, Iwai, Hiroshi
Published in Microelectronic engineering (2008)
Published in Microelectronic engineering (2008)
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Pt/Ba x Sr (1-x) TiO 3 /Pt Capacitor Technology for 0.15 µm Embedded Dynamic Random Access Memory
Tsunemine, Yoshikazu, Okudaira, Tomonori, Kashihara, Keiichiro, Yutani, Akie, Shinkawata, Hiroki, Mazumder, Motaharul Kabir, Ohno, Yoshikazu, Yoneda, Masahiro, Okuno, Yasutoshi, Tsuzumitani, Akihiko, Ogawa, Hisashi, Mori, Yoshihiro
Published in Japanese Journal of Applied Physics (01.05.2004)
Published in Japanese Journal of Applied Physics (01.05.2004)
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Stabilization of ultra-thin Pt bottom electrode for 0.15 μm cup-type BST capacitor
Tsuzumtani, Akihiko, Okuno, Yasutoshi, Yamanaka, Michinari, Mori, Yoshihiro
Published in Integrated ferroelectrics (01.01.2001)
Published in Integrated ferroelectrics (01.01.2001)
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MOMBE (Metalorganic Molecular Beam Epitaxy) growth of InGaSb on GaSb
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Published in Journal of crystal growth (01.02.1989)
Published in Journal of crystal growth (01.02.1989)
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MOMBE growth of GaSb and InAsSb using triethylstibine and triethylarsine
Kaneko, Tadaaki, Asahi, Hajime, Itani, Yasushi, Okuno, Yasutoshi, Gonda, Shun-ichi
Published in Journal of crystal growth (01.05.1991)
Published in Journal of crystal growth (01.05.1991)
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