Investigation of the dominant 1/f noise source in silicon nanowire sensors
Bedner, Kristine, Guzenko, Vitaliy A., Tarasov, Alexey, Wipf, Mathias, Stoop, Ralph L., Rigante, Sara, Brunner, Jan, Fu, Wangyang, David, Christian, Calame, Michel, Gobrecht, Jens, Schönenberger, Christian
Published in Sensors and actuators. B, Chemical (01.02.2014)
Published in Sensors and actuators. B, Chemical (01.02.2014)
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Journal Article
A Novel Approach to Produce Protein Nanopatterns by Combining Nanoimprint Lithography and Molecular Self-Assembly
Falconnet, Didier, Pasqui, Daniela, Park, Sunggook, Eckert, Rolf, Schift, Helmut, Gobrecht, Jens, Barbucci, Rolando, Textor, Marcus
Published in Nano letters (01.10.2004)
Published in Nano letters (01.10.2004)
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Journal Article
Analysis of 4H-SiC MOS capacitors on macro-stepped surfaces
Camarda, Massimo, Woerle, Judith, Souliere, Veronique, Ferro, Gabriel, Sigg, Hans, Grossner, Ulrike, Gobrecht, Jens
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
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Conference Proceeding
Journal Article
Controlled co-evaporation of silanes for nanoimprint stamps
Schift, Helmut, Saxer, Sina, Park, Sunggook, Padeste, Celestino, Pieles, Uwe, Gobrecht, Jens
Published in Nanotechnology (01.05.2005)
Published in Nanotechnology (01.05.2005)
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Journal Article
Fabrication of polymer photonic crystals using nanoimprint lithography
Schift, Helmut, Park, Sunggook, Jung, Bokyung, Choi, Choon-Gi, Kee, Chul-Sik, Han, Sang-Pil, Yoon, Keun-Byoung, Gobrecht, Jens
Published in Nanotechnology (01.05.2005)
Published in Nanotechnology (01.05.2005)
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Journal Article
Surface structuring of textile fibers using roll embossing
Schift, Helmut, Halbeisen, Marcel, Schütz, Urs, Delahoche, Benjamin, Vogelsang, Konrad, Gobrecht, Jens
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Interference lithography at EUV and soft X-ray wavelengths: Principles, methods, and applications
Mojarad, Nassir, Gobrecht, Jens, Ekinci, Yasin
Published in Microelectronic engineering (01.08.2015)
Published in Microelectronic engineering (01.08.2015)
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Journal Article
Nanostructuring of anti-adhesive layers by hot embossing lithography
Park, Sunggook, Padeste, Celestino, Schift, Helmut, Gobrecht, Jens
Published in Microelectronic engineering (01.06.2003)
Published in Microelectronic engineering (01.06.2003)
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Journal Article
Conference Proceeding
20nm Line/space patterns in HSQ fabricated by EUV interference lithography
Ekinci, Yasin, Solak, Harun H., Padeste, Celestino, Gobrecht, Jens, Stoykovich, Mark P., Nealey, Paul F.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
High-resolution and large-area nanoparticle arrays using EUV interference lithography
Karim, Waiz, Tschupp, Simon Andreas, Oezaslan, Mehtap, Schmidt, Thomas J, Gobrecht, Jens, van Bokhoven, Jeroen A, Ekinci, Yasin
Published in Nanoscale (28.04.2015)
Published in Nanoscale (28.04.2015)
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Journal Article
Sub-wavelength printing in the deep ultra-violet region using Displacement Talbot Lithography
Wang, Li, Clube, Francis, Dais, Christian, Solak, Harun H., Gobrecht, Jens
Published in Microelectronic engineering (01.08.2016)
Published in Microelectronic engineering (01.08.2016)
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Journal Article
Analysis of thin thermal oxides on (0001) SiC epitaxial layers
Woerle, Judith, Camarda, Massimo, Schneider, Christof W., Sigg, Hans, Grossner, Ulrike, Gobrecht, Jens
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
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Conference Proceeding
Journal Article
Surface patterned polymer micro-cantilever arrays for sensing
Urwyler, Prabitha, Schift, Helmut, Gobrecht, Jens, Häfeli, Oskar, Altana, Mirco, Battiston, Felice, Müller, Bert
Published in Sensors and actuators. A. Physical. (01.12.2011)
Published in Sensors and actuators. A. Physical. (01.12.2011)
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Journal Article
Measurement of demolding forces in full wafer thermal nanoimprint
Trabadelo, Vera, Schift, Helmut, Merino, Santos, Bellini, Sandro, Gobrecht, Jens
Published in Microelectronic engineering (01.05.2008)
Published in Microelectronic engineering (01.05.2008)
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Journal Article
Conference Proceeding
High-resolution and large-area nanoparticle arrays using EUV interference lithographyElectronic supplementary information (ESI) available: Multiple-beam EUV interference lithography using HSQ gratings with footing (S1); EUV-IL using ATL with HSQ gratings (S2). See DOI: 10.1039/c5nr00565e
Karim, Waiz, Tschupp, Simon Andreas, Oezaslan, Mehtap, Schmidt, Thomas J, Gobrecht, Jens, van Bokhoven, Jeroen A, Ekinci, Yasin
Year of Publication 09.04.2015
Year of Publication 09.04.2015
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Journal Article