A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0
Volksen, Willi, Magbitang, Teddie P., Miller, Robert D., Purushothaman, Sampath, Cohen, Stephan A., Nakagawa, Hisashi, Nobe, Youhei, Kokubo, Terukazu, Dubois, Geraud J. M.
Published in Journal of the Electrochemical Society (2011)
Published in Journal of the Electrochemical Society (2011)
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Journal Article
Integration of a Manufacturing Grade, k = 2.0 Spin-On Material in a Single Damascene Structure
Volksen, Willi, Purushothaman, Sampath, Darnon, Maxime, Lofaro, Mike F., Cohen, Stephan A., Doyle, James P., Fuller, Nicholas, Magbitang, Teddie P., Rice, Philip M., Krupp, Leslie E., Nakagawa, Hisashi, Nobe, Youhei, Kokubo, Terukazu, Dubois, Geraud J. M.
Published in ECS journal of solid state science and technology (01.01.2012)
Published in ECS journal of solid state science and technology (01.01.2012)
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Journal Article