Mass-productive ultra-low temperature ALD SiOi process promising for sub-90nm memory and logic devices
PARK, Jae-Eun, KU, Ja-Hum, CHO, Byoung-Ha, KIM, Byoung-Chul, SHIN, Cheol-Ho, LEE, Joo-Won, YANG, Jong-Ho, CHU, Kang-Soo, LEE, Seung-Hwan, PARK, Moon-Han, LEE, Nae-In, KANG, Ho-Kyu, SUH, Kwang-Pyuk
Year of Publication 2002
Get full text
Year of Publication 2002
Conference Proceeding
Mass-productive ultra-low temperature ALD SiO/sub 2/ process promising for sub-90 nm memory and logic devices
Jae-Eun Park, Ja-Hum Ku, Joo-Won Lee, Jong-ho Yang, Kang-Soo Chu, Seung-Hwan Lee, Moon-Han Park, Nae-In Lee, Ho-Kyu Kang, Kwang-Pyuk Suh, Byoung-Ha Cho, Byoung-Chul Kim, Cheol-Ho Shin
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
Get full text
Conference Proceeding