Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers
Berggren, Karl K., Bard, Andreas, Wilbur, James L., Gillaspy, John D., Helg, Andreas G., McClelland, Jabez J., Rolston, Steven L., Phillips, William D., Prentiss, Mara, Whitesides, George M.
Published in Science (American Association for the Advancement of Science) (01.09.1995)
Published in Science (American Association for the Advancement of Science) (01.09.1995)
Get full text
Journal Article
Elastomeric Optics
Wilbur, James L, Jackman, Rebecca J, Whitesides, George M, Cheung, Eunice L, Lee, Larry K, Prentiss, Mara G
Published in Chemistry of materials (11.07.1996)
Published in Chemistry of materials (11.07.1996)
Get full text
Journal Article